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                                    是一家集真空儀器裝置研發、生產、銷售、服務為一體的高科技企業其前身是中科院直屬事業單位，創建于1958年，2001年整體轉制為有限責任公司，2011年12月整體變更為股份有限公司。
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<div class="youB">TRP450磁控濺射系統</div>
<div class="miaoS">編號：3<br />
類別：磁控濺射鍍膜系統<br />

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<p><strong><span style="font-size: medium; font-family: 黑體;">設備用途</span></strong></p>
<p><span style="font-size: medium; font-family: 黑體;">&nbsp; &nbsp; 用于納米級單層及多層功能膜、硬質膜、金屬膜、半導體膜、介質膜等新型薄膜材料的制備?？蓮V泛應用于大專院校、科研院所的薄膜材料的科研與小批量制備。</span></p>
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<p><strong><span style="font-size: medium; font-family: 黑體;">設備組成</span></strong></p>
<p><span style="font-size: medium; font-family: 黑體;">&nbsp; &nbsp; 系統主要由濺射真空室、永磁磁控濺射靶（三個靶）、單基片加熱臺、直流電源、射頻電源、工作氣路、抽氣系統、真空測量、電控系統及安裝機臺等部分組成。</span></p>
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<p><span style="font-size: medium; font-family: 黑體;">1、極限真空度：&le;<span lang="EN-US">6.6x10</span><span style="font-size: x-small;"><sup><span lang="EN-US">-6</span></sup></span><span lang="EN-US">Pa；</span></span></p>
<p><span style="font-size: medium; font-family: 黑體;"><span lang="EN-US">2、</span><span lang="EN-US">25</span>分鐘可達到<span lang="EN-US">6.6x10<span style="font-size: x-small;"><sup>-4</sup></span>Pa；</span></span></p>
<p><span style="font-size: medium; font-family: 黑體;"><span lang="EN-US">3、</span>磁控濺射靶：2英寸x3套；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">4、直流濺射電源：500Wx2套；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">5、射頻濺射電源：500Wx1套；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">6、樣品尺寸：4英寸x1片；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">7、樣品溫度：最高800℃；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">8、分子泵系統：1套；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">9、薄膜壓力真空規：1套；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">10、冷卻水路系統：1套；</span></p>
<p><span style="font-size: medium; font-family: 黑體;">11、自動控制系統：1套。</span></p></ul>
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 <p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">公司：中國科學院沈陽科學儀器股份有限公司<span lang="EN-US">&nbsp;</span></span></p>
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<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">電話：<span lang="EN-US">024-23826899</span>、<span lang="EN-US">024-23826855</span></span></p>
<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">傳真：<span lang="EN-US">024-23826828</span></span></p>
<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">郵箱：<span lang="EN-US">sales@sky.ac.cn</span></span></p>
<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">網址：<span lang="EN-US">www.benoithamon.com</span></span></p>
<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">開戶行：建行沈陽渾南新區產業園分理處</span></p>
<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">賬號：<span lang="EN-US">2100 1394 6010 5958 1266</span></span></p>
<p class="MsoNormal"><span style="font-size: medium; font-family: 黑體;">納稅號：<span lang="EN-US">912101 0041 0581 2660</span></span></p>
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